Microtechnology/Microelectromechanical Systems (MEMS)

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Applications[edit | edit source]

Resonators[edit | edit source]

Strain Gauges[edit | edit source]

Pressure Sensors[edit | edit source]

AFM cantilevers[edit | edit source]

Acceleration Detectors[edit | edit source]

Optical Beam Control[edit | edit source]

RF MEMS[edit | edit source]

Reliability design rules[edit | edit source]

Sandia has published a set of "reliability design rules" for MEMS devices intended to avoid failure modes experienced in early MEMS device tests. The most common failure mechanism was wear of the rubbing surfaces. [1]

References[edit | edit source]

See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.

  1. Danelle M. Tanner et. al. "MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes". Sandia. 2000.