Microtechnology/Additional Methods
Additional Methods
[edit | edit source]Apart from additiev and etching processes, there is also a range of processes to alter the materials properties and to characterize them.
Rapid Thermal Anneal (RTA)
[edit | edit source]Wafer Bonding
[edit | edit source]- Direct bonding
- Plasma activated bonding
- Anodic bonding
- Eutectic bonding
- Glass frit bonding
- Adhesive bonding
- Thermocompression bonding
- Reactive bonding
Electrical Connections
[edit | edit source]Doping
[edit | edit source]Ion Implantation
[edit | edit source]Diffusion Doping
[edit | edit source]Spin-on doping
[edit | edit source]Packaging
[edit | edit source]Interconnections
[edit | edit source]- Wire bonding
- Flip chip bonding
- Wedge bonding
- Using ZIF sockets
Encapsulation
[edit | edit source]- Silicone oil
- Spray-on polymers
Glues
[edit | edit source]- Epo-tek H77 is a common packaging two-component UHV compatible epoxy glue.
- Fortafix makes a high temperature glue that should work up to around 1000 C called Rocksett.
- Vitcas Refractories manufacturer of high temperature glue/adhesives for industrial and domestic use up to 1700 C
Ellipsometry
[edit | edit source]Ellipsometers are used to measure thin film thicknesses by their optical properties (refractive index and reflectivity/absorbance).
4 Point Measurements
[edit | edit source]The four-point probe technique can be used to measure the conductivity of thin films. For improved measurements micro four-point probes can be used. Capres has an application note about micro four-point probes.
Atomic Force Microscopy
[edit | edit source]The Atomic force microscope (AFM) is mainly used to measure the topography of a surface, such as the roughness.
Scanning Electron Microscopy
[edit | edit source]JEOL has a good guide to SEM image interpretation
Optical Microscopy
[edit | edit source]Theres a good introduction to optical microscopy from Zeiss.
Vacuum Equipment
[edit | edit source]- mass flow controllers (MFC) Gas conversion factors and formulas for calculating them
References
[edit | edit source]See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.