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File:DCplasmaSputtering.jpg

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Summary

  • Figure Caption: Energetic ions sputter material off the target which diffuse through the plasma towards the substrate where it is deposited. There is no strong plasma glow around the cathode since it takes a certain distance for the plasma to be generated by electron avalanches started by a few secondary electrons from the sputtering process.
  • Illustration by Kristian Molhave - contact me if you have suggestions/corrections to the figure, or would like the original figure.

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Date/TimeThumbnailDimensionsUserComment
current21:53, 23 November 2006Thumbnail for version as of 21:53, 23 November 2006670 × 663 (166 KB)KristianMolhave*Figure Caption: Energetic ions sputter material off the target which diffuse through the plasma towards the substrate where it is deposited. There is no strong plasma glow around the cathode since it takes a certain distance for the plasma to be generate

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