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Contents |
[edit] Applications
[edit] Resonators
[edit] Strain Gauges
[edit] Pressure Sensors
[edit] AFM cantilevers
[edit] Acceleration Detectors
[edit] Optical Beam Control
[edit] RF MEMS
[edit] Reliability design rules
Sandia has published a set of "reliability design rules" for MEMS devices intended to avoid failure modes experienced in early MEMS device tests. The most common failure mechanism was wear of the rubbing surfaces. [1]
[edit] References
See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.
- ↑ Danelle M. Tanner et. al. "MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes". Sandia. 2000.
