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Contents 1 Insulators 1.1 Polymers 2 Silicon Dioxide 3 Silicon Nitride 4 PMMA 5 PDMS 6 SU8 7 References

[edit] Insulators

[edit] Polymers

• tables of properties of polymers

[edit] Silicon Dioxide

Silicon Dioxide

[edit] Silicon Nitride

Silicon Nitride

[edit] PMMA

PMMA

[edit] PDMS

PDMS

[edit] SU8

SU8

[edit] References

See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.