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Contents 1 Additional Methods 2 Rapid Thermal Anneal (RTA) 3 Wafer Bonding 4 Electrical Connections 5 Doping 5.1 Ion Implantation 5.2 Diffusion Doping 5.3 Spin-on doping 6 Packaging 6.1 Interconnections 6.2 Encapsulation 6.2.1 Glues 7 Ellipsometry 8 4 Point Measurements 9 Atomic Force Microscopy 10 Scanning Electron Microscopy 11 Optical Microscopy 12 Vacuum Equipment 13 References

[edit] Additional Methods

Apart from additiev and etching processes, there is also a range of processes to alter the materials properties and to characterize them.

[edit] Rapid Thermal Anneal (RTA)

• Rapid thermal anneal (RTA)

[edit] Wafer Bonding

[edit] Electrical Connections

[edit] Doping

• Dopant

[edit] Ion Implantation

• Ion Implantation

[edit] Diffusion Doping

[edit] Spin-on doping

[edit] Packaging

[edit] Interconnections

• Wire bonding
• Flip chip bonding
• Wedge bonding
• Using ZIF sockets

[edit] Encapsulation

• Silicone oil
• Spray-on polymers

[edit] Glues

• Epo-tek H77 is a common packaging two-component UHV compatible epoxy glue.
• Fortafix makes a high temperature glue that should work up to around 1000 C called Rocksett.
• Vitcas Refractories manufacturer of high temperature glue/adhesives for industrial and domestic use up to 1700 C

[edit] Ellipsometry

Ellipsometers are used to measure thin film thicknesses by their optical properties (refractive index and reflectivity/absorbance).

[edit] 4 Point Measurements

The four-point probe technique can be used to measure the conductivity of thin films. For improved measurements micro four-point probes can be used. Capres has an application note about micro four-point probes.

[edit] Atomic Force Microscopy

The Atomic force microscope (AFM) is mainly used to measure the topography of a surface, such as the roughness.

[edit] Scanning Electron Microscopy

JEOL has a good guide to SEM image interpretation

[edit] Optical Microscopy

Theres a good introduction to optical microscopy from Zeiss.

[edit] Vacuum Equipment

• mass flow controllers (MFC) Gas conversion factors and formulas for calculating them

[edit] References

See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.